6517B Electrometer/High Resistance Meter

The Keithley 6517B Electrometer/High Resistance Meter is the worldwide research laboratory standard for sensitive measurements. With over 60 years of low level measurement expertise, Keithley electrometers provide reliable measurements of current levels down to 10 aA (10×10^-18 A), charge levels down to 1 fC, and the highest resistance measurements available up to 10¹⁸ Ω. The 6517B is also capable of measuring the largest voltage range—up to 200 V—with an input impedance exceeding 200 TΩ. All this performance is built into an instrument that operates as simply as a digital multimeter.

Exceptional Performance Specifications

The 6517B has incorporated Keithley's decades of expertise in low level measurement technology into an innovative, low current input amplifier with an input bias current of <3 fA, just 0.75 fA p-p noise, and <20 μV burden voltage on the lowest current ranges. The voltage circuit input impedance is greater than 200 TΩ for near­ideal circuit loading. These specifications ensure the accuracy and sensitivity needed for accurate low current and high impedance voltage, resistance, and charge measurements in areas of research such as physics, optics, nanotechnology, and materials science. A built- in ±1 kV voltage source with sweep capability simplifies performing leakage, breakdown, and resistance testing, as well as volume (Ω-cm) and surface resistivity (Ω∕square) measurements on insulating materials.

Key Features

• Measures resistances up to 10¹⁸ Ω

• 10 aA (10×10^-18 A) current measurement resolution

• Complete hardware-software solution for ASTM D257 high resistivity measurements with the 6517B, 8009 Resistivity Test Fixture, and the KickStart High Resistivity Measurement Application

• <3 fA input bias current

• 6½-digit high accuracy measurement mode

• <20 μV burden voltage on the lowest current ranges

• Voltage measurements up to 200 V with >200 Ω input impedance

• Built-in ±1000 V voltage source

• Unique alternating polarity voltage sourcing and measurement method for high resistance measurements

• Built-in test sequences for four different device characterization tests, surface and volume resistivity, surface insulation resistance, and voltage sweeping

• Optional plug-in scanner cards for testing up to ten devices or material samples with one test setup

• GPIB and RS-232 interfaces

• Wide Measurement Ranges

• The 6517B offers autoranging over the full span of ranges on current, resistance, voltage, and charge measurements. The 6517B combines the following measurement capabilities:

• • Ultra-sensitive ammeter with current measurement from 10 aA to 20 mA

• • Highest impedance voltmeter with voltage measurement from 1 μV to 200 V

• • Ultra-high range ohmmeter with resistance measurement from 1 Ω to 10¹⁸ Ω

• • Sensitive coulombmeter with charge measurement from 1 fC to 2 μC